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This RP provides guidance for maintaining a cleanroom at the level for which it was designed. It is intended as a guide for establishing appropriate housekeeping procedures essential for the overall contamination control program of the cleanroom. Test procedures are provided for use in establishing the frequency of housekeeping, monitoring the effectiveness of the housekeeping, and helping to determine appropriate levels of surface cleanliness for specific cleanrooms. Incorporated in the RP is a new surface cleaning efficiency test method for nonviable particles that provides an automated measurement of surface cleanliness as it pertains to the efficiency of a wiping material to remove liquid contaminants from a surface.

Product Details

Published:

07/01/2007

ISBN(s):

9781877862854

Number of Pages:

24

File Size:

1 file , 1.1 MB